SEMI M32 - Guide to Statistical Specifications
This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published September 1998; previously published July 2004.
Specifications are based on requirements negotiated between trading partners. This document describes an explicit specification form that defines the risk level as a part of parametric specifications. This approach uses process capability information to focus quality improvement efforts, reduce sampling, and maintain low risks. It is based on the fundamental belief that specifications should facilitate the movement toward processed-in quality instead of inspected-in quality. It is important for suppliers and their customers to acknowledge and mutually agree on quality levels so the methods employed will satisfy their expectations. Statistical specifications provide a convenient way to do this.
Referenced SEMI Standards
SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers
SEMI M18 — Format for Silicon Wafer Specification Form for Order Entry
SEMI M57 — Guide for Specifying Silicon Annealed Wafers
SEMI M59 — Terminology for Silicon Technology
SEMI M61 — Specification for Silicon Epitaxial Wafers with Buried Layers
SEMI M62 — Specifications for Silicon Epitaxial Wafers