M04100 - SEMI M41 - 電源デバイス/IC用シリコン・オン・インシュレーター(SOI)の仕様

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Silicon Wafer Committeeで技術的に承認されている。現版は2007425日,global Audits and Reviews Subcommitteeにて発行が承認された。20076月にwww.semi.orgで,そして20077月にCD-ROMで入手可能となる。初版は20006月発行,前版は200111月に発行された。


Referenced SEMI Standards

SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers
SEMI M34 — Guide for Specifying SIMOX Wafers
SEMI M53 — Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Polystyrene Latex Spheres on Unpatterned

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