M04300 - SEMI M43 - ウェーハナノポトグラフィを報告するためのガイド

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

本ガイドは,Global Silicon Wafer Committeeで技術的に承認されたもので,North American Silicon Wafer Committeeが直接責任を負うものである。現版は11月22日にNorth American Regional Standards Committeeによって承認された。2000年12月にまずwww.semi.orgで入手可能となり,2001年3月に発行に至る。





Referenced SEMI Standards

SEMI M1 — Specification for Monocrystalline Polished Silicon Wafers

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