M04500 - SEMI M45 - 300 mmウェーハシッピングシステムに関する暫定仕様

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

暫定仕様は,Global Silicon Wafer Committeeで技術的に承認されたもので,European Silicon Wafer Committeeが直接責任を負うものである。現版は200343European Regional Standards Committeeによって承認されている。20036月にまずwww.semi.orgで入手可能なり,20037月に発行に至る。初版は20013月発行。


Referenced SEMI Standards

SEMI M31 — Provisional Mechanical Specifications for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
SEMI T3 — Specification for Wafer Box Labels

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