SEMI M45 - Specification for 300 mm Wafer Shipping System
This Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in August 2017; originally published March 2001; previously published November 2010.
This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm wafers from the wafer supplier to the customer.
This Standard stipulates materials relating to transport of 300 mm wafers using shipping boxes (FOSB) regulated by SEMI M31, and includes wafer shipping boxes, bags, labels, cushions, secondary containers, pallets, and shipping documentation.
Referenced SEMI Standards
SEMI M31 — Mechanical Specifications for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
SEMI T3 — Specification for Wafer Box Labels