SEMI M55 - 鏡面単結晶シリコンカーバイドウェーハの仕様 -

Member Price: $155.00
Non-Member Price: $203.00

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI M55-0308 - Superseded



本スタンダードは,global Compound Semiconductor Committeeで技術的に承認されている。現版は20071220日,global Audits and Reviews Subcommitteeにて発行が承認された。20082月にwww.semi.orgで,そして20083月にCD-ROMで入手可能となる。初版は20033月に発行された。


Subordinate Documents:

SEMI M55.1-0308 — 直径50.8 mm 4Hおよび6H型鏡面単結晶シリコンカーバイドウェーハの仕様

SEMI M55.2-0308 — 直径76.2 mm 4H および6H 型鏡面単結晶シリコンカーバイドウェーハの仕様

Referenced SEMI Standards

SEMI M1 — Specification for Polished Monocrystalline Silicon Wafers
SEMI T5 — Specification for Aplhanumeric Marking of Round Compound Semiconductor Wafers

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.