M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

本仕様は,global Compound Semiconductor Materials Committeeで技術的に承認されている。現版は2006116日,global Audits and Reviews Subcommitteeにて発行が承認された。2006年2月にwww.semi.orgで,そして2006年3月にCD-ROMで入手可能となる。




Referenced SEMI Standards


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