SEMI M74 - Specification for 450 mm Diameter Mechanical Handling Polished Wafers -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard specifies 450 mm diameter mechanical handling wafers intended for use in research, development and early design investigation of 450 mm semiconductor equipment such as 450 mm wafers, carriers, load ports, AMHS, and robotics.

This Specification covers dimensional requirements for 450 mm diameter polished silicon wafers. This Specification is intended to address a short-term need for handling wafers. It is not intended to specify wafers used in process development or for technology-specific circuit-quality applications. This Standard should be superseded by a process development wafer specification, a prime wafer specification and technology-specific guidelines for circuit-quality wafers.

A complete purchase specification may require that additional physical properties be specified along with test methods for determining their magnitude.

Wafers meeting the basic specification requirements herein are suitable for use as ‘mechanical handling’ wafers for equipment set-up and robotic handling applications.

Referenced SEMI Standards (purchase separately)

SEMI M1 — Specification for Polished Single Crystal Silicon Wafers

SEMI M59 — Terminology for Silicon Technology

SEMI MF533 — Test Method for Thickness and Thickness Variation of Silicon Wafers

SEMI MF928 — Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

SEMI MF1152 — Test Method for Dimensions of Notches on Silicon Wafers

SEMI MF1530 — Test Method for Measuring Flatness, Thickness, and Total Thickness Variation on Silicon Wafers by Automated Non-Contact Scanning

SEMI T3 — Specification for Wafer Box Labels

SEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol

Revision History

SEMI M74-1108 (Reapproved 1018)

SEMI M74-1108 (Reapproved 0413)

SEMI M74-1108 (first published)

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