M07500 - SEMI M75 - 鏡面単結晶ガリウムアンチモンスライスの仕様

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

免責事項: このSEMIスタンダードは,投票により作成された英語版が正式なものであり,日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます。


本スタンダードは,global Compound Semiconductor Committeeで技術的に承認されている。現版は2008年11月19日,global Audits and Reviews Subcommitteeにて発行が承認された。2009年2月にwww.semi.orgで。



Referenced SEMI Standards

SEMI M9-90 — Specifications for Polished Monocrystalline Gallium Arsenide Slices
SEMI MF26 — Test Methods for Determining the Orientation of a Semiconductive Single Crystal
SEMI MF671 — Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
SEMI T5 — Specification for Alphanumeric Marking of Round Gallium Arsenide Wafers

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