M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers

SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers -

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Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI M75-0816 - Inactive

Revision

Abstract

　

The purpose of this Document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material.

　

This Specification covers the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers.

 

　

Referenced SEMI Standards

SEMI MF26 — Test Method for Determining the Orientation of a Semiconductive Single Crystal
SEMI MF671 — Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
SEMI T5 — Specification for Alphanumeric Marking of Round Gallium Arsenide Wafers

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