SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers
This Standard was technically approved by the Compound Semiconductor Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 21, 2016. Available at www.semiviews.org and www.semi.org in August 2016; originally published March 2009; previously published August 2012.
The purpose of this Document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material.
This Specification covers the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers.
Referenced SEMI Standards
SEMI MF26 — Test Method for Determining the Orientation of a Semiconductive Single Crystal
SEMI MF671 — Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
SEMI T5 — Specification for Alphanumeric Marking of Round Gallium Arsenide Wafers