SEMI M80 - Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard specifies the front-opening shipping box (FOSB) used to ship 450 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality.

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring interoperability at all mechanical interfaces.

This Standard assumes that the 450 FOSB is used in loading raw silicon wafers after inspection in Si suppliers and also used in acceptance and inspection, after which raw silicon wafers are transferred to another carrier at device makers. The 450 FOSB is not intended to be used in IC manufacturing processes. It is recommended that wafers be transferred from the 450 FOSB to a 450 FOUP using automated methods.

Referenced SEMI Standards (purchase separately)

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI E158 — Mechanical Specification for FAB Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

SEMI E162 — Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port

SEMI M1 — Specification for Polished Single Crystal Silicon Wafers

SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers

Revision History

SEMI M80-0116 (technical revision)

SEMI M80-0514 (technical revision)

SEMI M80-0812 (technical revision)

SEMI M80-1111 (first published)

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