SEMI MF95 - Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer -

Abstract

This Test Method is a manual technique that requires the use of a dispersive infrared spectrophotometer. For this measurement, the resistivity of the substrate must be less than 0.02 Ω·cm at 23°C and the resistivity of the layer must be greater than 0.1 Ω·cm at 23°C. A brief description of the theory of this Test Method is given in Related Information 1.

This technique is capable of measuring the thickness of both n- and p-type layers greater than 2 µm thick. With reduced precision, the technique may also be applied to both n- and p-type layers from 0.5 µm to 2 µm thick.

Automated test systems, utilizing Fourier-transform infrared spectrophotometry (FT-IR), are now widely used for epitaxial layer thickness measurements. Because such instruments are normally supplied with proprietary software for measurement analysis, detailed procedures for the use of such instruments are not included in this Test Method. However, for information purposes, estimates of single instrument repeatability and multi-instrument reproducibility, based on a 1986/1987 multilaboratory comparison of FT-IR instrument measurements are given in Note 6 and Related Information 2.

Procedures for preparing the specimen, for measuring its size, and for determining the temperature of the specimen during the measurements are also given.

Referenced SEMI Standards (purchase separately)
SEMI M59 — Terminology for Silicon Technology
SEMI MF84 — Test Method for Measuring Resistivity of Silicon Wafers with an In-Line Four-Point Probe

Revision History
SEMI MF95-1107 (Reapproved 1023)
SEMI MF95-1107 (Reapproved 0718)
SEMI MF95-1107 (Reapproved 1012)
SEMI MF95-1107 (technical revision)
SEMI MF95-1105 (technical revision)
SEMI MF95-89 (Reapproved 2000) (first SEMI publication)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.