SEMI MF1569 - Guide for Generation of Consensus Reference Materials for Semiconductor Technology -

Abstract

This Guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology.
 

The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with ASTM E691. It is assumed for the purposes of this Guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef.
 

This Guide does not cover the selection of one of several possible test methods nor does it cover the case for which other reference materials must be used in the measurement of the properties of the ConRef.
 

This Guide also describes procedures that may be used to generate consensus property values that may form the basis for the generation of multiple sets of CRMs or reference materials (RMs).

Referenced SEMI Standards (purchase separately)
SEMI M59 — Terminology for Silicon Technology

Revision History
SEMI MF1569-0307 (Reapproved 1023)
SEMI MF1569-0307 (Reapproved 0718)
SEMI MF1569-0307 (Reapproved 0512)
SEMI MF1569-0307 (technical revision)
SEMI MF1569-0705 (technical revision)
SEMI MF1569-94 (Reapproved 1999) (first SEMI publication)

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