MF172500 - SEMI MF1725 - Practice for Analysis of Crystallographic Perfection of Silicon Ingots

Volume(s): Silicon Materials & Process Control
Language: English
Type: Single Standards Download (.pdf)
Abstract


NOTICE: This Document was reapproved with minor editorial changes.

 

The use of silicon wafers in many semiconductor devices requires a consistent atomic lattice structure. Crystal defects disturb local lattice energy conditions that are the basis for semiconductor behavior. These defects have distinct effects on essential semiconductor device-manufacturing processes such as alloying and diffusion.

 

This Practice provides guidance regarding procedures for analysis of crystal defects of silicon ingots from which silicon wafers are cut.

 

This Practice together with the referenced standards may be used for process control, research and development, and materials acceptance purposes.


This Practice covers the analysis of the crystallographic perfection in silicon ingots. The steps described are sample preparation, etching solution selection and use, defect identification, and defect counting.

 

This Practice is suitable for use in evaluating silicon grown in either the [111] or the [100] direction and doped either p- or n-type with resistivity greater than 0.005 Ω·cm.

 

Referenced SEMI Standards (purchase separately)

SEMI C18 — Specification for Acetic Acid

SEMI C28 — Specification for Hydrofluoric Acid

SEMI C35 — Specification and Guide for Nitric Acid

SEMI M59 — Terminology for Silicon Technology

SEMI MF26 — Test Method for Determining the Orientation of a Semiconductor Single Crystal

SEM MF523 — Practice for Unaided Visual Inspection of Polished Silicon Wafers

SEMI MF1809 — Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon

SEMI MF1810 — Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers

 

Revision History

SEMI MF1725-1110 (Reapproved 0322)

SEMI MF1725-1110 (Reapproved 1115)

SEMI MF1725-1110 (technical revision)

SEMI MF1725-1103 (first SEMI publication)

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