SEMI MF1771 - Test Method for Evaluating Gate Oxide Integrity by Voltage Ramp Technique -

Abstract

The technique outlined in this Test Method is meant to standardize the procedure, analysis and reporting of oxide integrity data via the voltage ramp technique among interested parties. However, since the values obtained cannot be entirely divorced from the process of fabricating the test structure, suitable correlations should be performed based on process needs and structure selection. This correlation should include sample size as well as device geometry.

 

Measurement of the electrical integrity of oxides grown on silicon wafers may also be used in-house as a means of monitoring the quality of furnaces and other processing steps as well as judging the impact of changing some processing steps.

 

Selection of various edge and area intensive structures is crucial for isolating the nature of the defects. Techniques for using such structures to isolate the nature of detected defects is beyond the scope of this Test Method.

 

The actual results are somewhat dependent on the choice of gate electrode. Polysilicon gates have the advantage of being identical to finished product in many instances. Even for polysilicon gates, exact results depend upon values chosen for polysilicon thickness, doping, and sheet resistance.

The techniques outlined in this Standard are for the purpose of standardizing the procedure of measurement, analysis, and reporting of oxide integrity data between interested parties.

 

This Test Method makes no representation regarding actual device failure rates or acceptance/rejection criteria.

 

While some suggestions for data analysis are included in later sections of this Test Method, interpretation of results is beyond the scope of this Standard. Any such interpretations should be agreed upon between interested parties prior to testing. For example, a variety of failure criteria are included to permit separation of so-called intrinsic and extrinsic oxide failures.

 

Referenced SEMI Standards (purchase separately)

SEMI M51 — Test Method for Characterizing Silicon Wafers by Gate Oxide Integrity

SEMI M59 — Terminology for Silicon Technology

 

Revision History

SEMI MF1771-0416 (Reapproved 1121)

SEMI MF1771-0416 (technical revision)

SEMI MF1771-1110 (technical revision)

SEMI MF1771-0304 (technical revision)

SEMI MF1771-97 (Reapproved 2002) (first SEMI publication)

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