MS00300 - SEMI MS3 - Terminology for MEMS Technology

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the MEMS/NEMS Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at and in September 2015; originally published as SEMI PR11-1105; previously published March 2007.


Microelectromechanical Systems (MEMS) technology, while related in many ways to integrated circuit and device technology, has many differences as well. Terminology for MEMS, in particular, often differs significantly. To promote common understanding and clear communication among suppliers, customers, and others in the field, these terms should be defined.


This Terminology Document covers definitions of terms used in MEMS technology, especially in those areas of greatest interest to the SEMI community.


This Terminology covers terms describing generic attributes of MEMS devices and of materials and processes used in their manufacture. These attributes include electrical, structural, chemical, dimensional and other characteristics and nomenclature.


This Terminology is applicable for use in connection with research, development, process control, inspection, and procurement of MEMS materials and structures.


Almost all of the terms for which definitions are listed are nouns. Unless the part of speech is given for any particular term, it can be assumed that the term is a noun.


Referenced SEMI Standards

SEMI MS5 — Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures

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