SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems
This standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008.
This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation.
Referenced SEMI Standards
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F79 — Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components