MS00700 - SEMI MS7 - Specification for Microfluidic Interfaces to Electronic Device Packages

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at in June 2008.


This document defines an industry-standard for fluidic interfaces with electronic devices. The specification describes the connection attributes and specifies the interface dimensions required to design and build devices and systems that are compliant with this standard. The goal is to enable devices from different vendors to interconnect via an open architecture.


The specification is intended as an enhanced capability to state-of-the-art electronic device technologies incorporating a combination of electronics and fluidics. It is intended to provide device users adequate room for product versatility and market differentiation without the burden of carrying obsolete interfaces, losing compatibility, and choice.


Referenced SEMI Standards

SEMI MS6-0308 — Guide for Design and Materials for Interfacing Microfluidic Systems

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00