SEMI MS7 - Specification for Microfluidic Interfaces to Electronic Device Packages
This standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008.
This document defines an industry-standard for fluidic interfaces with electronic devices. The specification describes the connection attributes and specifies the interface dimensions required to design and build devices and systems that are compliant with this standard. The goal is to enable devices from different vendors to interconnect via an open architecture.
The specification is intended as an enhanced capability to state-of-the-art electronic device technologies incorporating a combination of electronics and fluidics. It is intended to provide device users adequate room for product versatility and market differentiation without the burden of carrying obsolete interfaces, losing compatibility, and choice.
Referenced SEMI Standards
SEMI MS6-0308 — Guide for Design and Materials for Interfacing Microfluidic Systems