MS00900 - SEMI MS9 - Specification for High Density Permanent Connections Between Microfluidic Devices

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the global MEMS/NEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at and in June 2011.


This Standard provides specification for interconnection dimensions and performance requirements for permanent microfluidic interfaces. It also provides guidance for interface design. This will help to enable low cost and high volume manufacturing of products having high density permanent interfaces between plastic tube adapters, plastic microfluidic cartridges, and electrofluidic devices.



Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components

SEMI MS7 — Specification for Microfluidic Interfaces to Electronic Device Packages

SEMI MS8 — Guide to Evaluating Hermeticity of MEMS Packages

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