SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions -

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Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI MS11-0318 - Current



This Standard was technically approved by the MEMS/NEMS Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at and in March 2018.


The purpose of this Document is to provide standard pitch dimensions for developers of microfluidic devices.


The Scope of this Document is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly.


Referenced SEMI Standards


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