MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions

SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI MS11-0318 (Reapproved 0525) - Current

Revision

Abstract

 

1  Purpose
1.1  This Specification provides the standard pitch dimensions for developers of microfluidic devices.
2  Scope
2.1  This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly.

 

Referenced SEMI Standards (purchase separately)
None.

 

Revision History
SEMI MS11-0318 (Reapproved 0525)
SEMI MS11-0318 (first published)

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