MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions

SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI MS11-0318 - Current

Revision

Abstract

This Standard was technically approved by the MEMS/NEMS Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in March 2018.

　

The purpose of this Document is to provide standard pitch dimensions for developers of microfluidic devices.

 

The Scope of this Document is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly.

　

Referenced SEMI Standards

None.

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

You May also Like