SEMI MS14 - Guide for Critical Parameters of Gas Sensors -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): MEMS
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI MS14-0422 - Current



As with many emerging technologies, gas sensor makers today do not conform to specific or well understood standards, whether it is with regards to parameter definitions, testing methods, reliability requirements, packaging, pin configurations, communication interfaces, etc., to name a few.


Given the state of technology evolution and the markets in this space, the timing is right for a set of defined standards regarding gas sensors. We envisage that not only will this encourage the important players to focus on innovation, but also contribute to quicker adoption in application areas where customization from the ground-up can often be a barrier to commercial success.


One example of such a barrier is that it is difficult for customers today to compare different gas sensors, or to use multiple devices within a single platform to sense different environmental gases.

This Guide describes a core of set of parameters that characterize a gas sensor and allow a data-driven comparison of gas sensor products for purposes of assessing suitability in end systems.


Referenced SEMI Standards (purchase separately)



Revision History

SEMI MS14-0422 (first published)

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