SEMI MS15 - Guide to MEMS Manufacturing Readiness Levels

Abstract

1  Purpose
1.1  This Guide provides best practices for the development and productization of microelectromechanical systems (MEMS). The goal is to have common documented readiness level definitions, processes and practices to facilitate the creation of MEMS products that meet targeted specification, performance, quality, cost, time to market, and other relevant product requirements.
2  Scope
2.1  This Guide aims to help companies assess and progress their readiness for manufacturing a MEMS product. The transition from basic research to mass production is broken down into eight levels which contain the following sections:
• Level Description — A detailed explanation of the specific stage of readiness.
• Challenges — An overview of the primary obstacles and difficulties encountered at this level.
• Activities and Tools — A comprehensive list of the recommended activities and tools necessary for progression.
• Exit Criteria — Clearly defined benchmarks and requirements before advancing to the next level.
2.2  While a large variety of MEMS products, processes, and technologies exist, this Guide provides tools and best practices that should be applicable to most scenarios, providing a solid foundation upon which to build a product specific phase-gate transition to mass production.

Referenced SEMI Standards (Purchase separately)
SEMI MS12 — Specification for Silicon Substrates Used in Fabrication of MEMS Devices
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment

Revision History
SEMI MS15-0325 (first published)

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