SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

NOTICE: This Document was completely rewritten in 2008.

 

This Specification covers the general requirements of the chrome thin film for hard surface photomasks.

 

Referenced SEMI Standards

SEMI P1 — Specification for Hard Surface Photomask Substrates

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