P00500 - SEMI P5 - ペリクルの仕様

Volume(s): Microlithography
Language: Japanese
Type: Single Standards Download (.pdf)

本仕様は,Global Micropatterning Committeeで技術的に承認されたもので,North American Microlithography Committeeが直接責任を負うものである。現版は,2004422North American Regional Standards Committeeにて承認されている。20046月にまずwww.semi.orgで入手可能になり,20047月発行に至る。初版は1986年発行,前版は1994年発行。

注意: 本文書は2004年,SEMI P5SEMI P5.1SEMI P5.2をまとめて全面的に書き換えられた。





Referenced SEMI Standards


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