SEMI P7 - Test Method of Viscosity Determination, Method A - Kinematic Viscosity

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in November 2011; originally published in 1982; previously published November 2003.

 

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This procedure describes a method for determining the kinematic viscosity of photoresists.

 

This method, a simplified version of ASTM D445 and ASTM F66 is intended for determining the kinematic viscosity of photoresists by measuring the time for a volume of liquid to flow under gravity through a calibrated glass capillary at a fixed temperature. Efflux time is measured in seconds and multiplied by the calibration constant of the viscometer to obtain kinematic viscosity in units of centistokes (cSt). Optionally, kinematic viscosity may be multiplied by the density of the photoresist to obtain dynamic viscosity in units of centipoise (cP). Refer to ASTM D445 and ASTM F66 for additional information and definitions.

 

Referenced SEMI Standards

None.

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