P00800 - SEMI P8 - Test Method for the Determination of Water in Photoresist

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in November 2011; originally published in 1984; previously published September 1997.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This procedure describes a method for the determination of water in photoresists.


This method is intended for the application of the Karl Fischer titration to the determination of water in photoresists. An electrometric method is used for determining the endpoint. The procedure is applicable to most resists that have polymer and solvent systems fully compatible with Karl Fischer reagent and diluent. The resist manufacturer should be consulted to determine if this procedure can be used with the resist in question.


Referenced SEMI Standards


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