P01100 - SEMI P11 - Test Method for Determination of Total Normality for Alkaline Developer Solutions

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2007. Available at www.semi.org in February 2008; originally published in 1991; previously published September 1997.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


The purpose of this Document is to provide a test method for determination of total normality for alkaline developer solutions.


An acid-base potentiometric titration to single or multiple inflection points is performed on an automatic recording titrator using standardized hydrochloric acid as the titrant. The normality (meq/mL) is then calculated by the titrator using the data obtained.


Referenced SEMI Standards


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