SEMI P12 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresists by Inductively Coupled Plasma Emission Spectroscopy (ICP)
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This procedure is an ICP plasma emission analysis for determination of iron, zinc, calcium, magnesium, copper, boron, aluminum, chromium, manganese, and nickel in photoresist. The applicable concentration range is 0.1 to 1 ppm when the sample is diluted 1 to 4. The precision was found to be within 0.1 ppm in a round robin analysis between four laboratories.
Referenced SEMI Standards
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