SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy -

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Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI P13-91 (Reapproved 1104) - Inactive



This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at September 2004; to be published November 2004. Originally published in 1991.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This procedure is a flame atomic absorption analytical method for sodium and potassium analysis in photoresist. The applicable concentration range is 0.1 to 1 ppm when the sample is diluted one to four. The precision was found to be within 0.1 ppm in a round-robin analysis between four laboratories.


Referenced SEMI Standards


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