SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy
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This procedure is a graphite furnace atomic absorption analytical method for tin in photoresist. The applicable concentration range is 0.1 to 1 ppm when the sample is diluted one to ten. The precision was found to be within 0.1 ppm in a round robin analysis between four laboratories.
Referenced SEMI Standards
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