P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This procedure is a graphite furnace atomic absorption analytical method for tin in photoresist. The applicable concentration range is 0.1 to 1 ppm when the sample is diluted one to ten. The precision was found to be within 0.1 ppm in a round robin analysis between four laboratories.


Referenced SEMI Standards


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