P01500 - SEMI P15 - Determination of Sodium and Potassium in Positive Photoresist Metal Ion Free (MIF) Developers by Atomic Absorption Spectroscopy

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published November 2004. Originally published in 1992.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This procedure is a flame atomic absorption analytical method for sodium and potassium analysis in photoresist MIF developers. The applicable concentration range is 20 to 1000 ppb.


Referenced SEMI Standards


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