P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

Definitions for the overlay capabilities of wafer steppers are established, consistent with the primary application of wafer stepper (i.e., the manufacturing of very large-scale integrated circuits). Also included are definitions for associated parameters: registration, exposure field, good fields, and alignment.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI P18-92 (Reapproved 1104)E (editorial revision)

SEMI P18-92 (Reapproved 1104)

SEMI P18-92 (first published)

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