SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers -

Member Price: $130.00
Non-Member Price: $170.00

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI P18-92 (Reapproved 1104)E - Inactive



NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


Definitions for the overlay capabilities of wafer steppers are established, consistent with the primary application of wafer stepper (i.e., the manufacturing of very large-scale integrated circuits). Also included are definitions for associated parameters: registration, exposure field, good fields, and alignment.


Referenced SEMI Standards (purchase separately)



Revision History

SEMI P18-92 (Reapproved 1104)E (editorial revision)

SEMI P18-92 (Reapproved 1104)

SEMI P18-92 (first published)

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.