P01900 - SEMI P19 - 集積回路製造用メトロロジパターンセル

Volume(s): Microlithography
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Micropatterning Committeeで技術的に承認されている。現版は2007425日,global Audits and Reviews Subcommitteeにて発行が承認された。20076月にwww.semi.orgで,そして20077月にCD-ROMで入手可能となる。初版は1992年発行,前版は1996年に発行された。




Referenced SEMI Standards

SEMI P24 — CD Metrology Procedures

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