P03500 - SEMI P35 - マイクロリソグラフィメトロロジの用語法

Volume(s): Microlithography
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Micropatterning Committeeで技術的に承認されている。現版はglobal Audits and Reviews Subcommittee2006824日に発行が承認された。200610月にwww.semi.orgで, そして200611月にCD-ROMで入手可能となる。初版は20002月発行,前版は20047月に発行された。




Referenced SEMI Standards

SEMI E89 — Guide for Measurement System Analysis (MSA)
SEMI P28 — Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture

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