SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Guide is (1) to define common and important specifications of magnification references which are used for calibrating magnifications of critical dimension measurement scanning electron microscopes (CD-SEMs), and as the result (2) to provide magnification references which are easy for anyone to use.

 

It is preferable that design, manufacture and purchase specifications for CD-SEM magnification references conform to this Guide.

 

Referenced SEMI Standards

None.

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