SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)
The purpose of this Guide is (1) to define common and important specifications of magnification references which are used for calibrating magnifications of critical dimension measurement scanning electron microscopes (CD-SEMs), and as the result (2) to provide magnification references which are easy for anyone to use.
It is preferable that design, manufacture and purchase specifications for CD-SEM magnification references conform to this Guide.
Referenced SEMI Standards
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