SEMI P37 - 極紫外線リソグラフィマスク基板の仕様 -

Member Price: $155.00
Non-Member Price: $203.00

Volume(s): Microlithography
Language: Japanese
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI P37-1102 - Superseded



本スタンダードは,Global Micropatterning Committeeで技術的に承認されたもので,North American Micropatterning Committeeが直接責任を負うものである。現版は,2002829 North American Regional Standards Committeeに承認され20029月にまずwww.semi.orgで入手可能となり200211月発行に至る。初版は200111月。




Referenced SEMI Standards


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