SEMI P45 - Specification for Job Deck Data Format for Mask Tools

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Document defines the common job deck data format specifications for mask tools, namely "MALY."

 

MALY specification applies to the input data format for mask tools.

 

Referenced SEMI Standards

SEMI P39 — Specification for OASIS®Open Artwork System Interchange Standard
SEMI P44 — Specification for Open Artwork System Interchange Standard (OASIS®) Specific to Mask Tools

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