P04500 - SEMI P45 - Specification for Job Deck Data Format for Mask Tools

SEMI P45 - Specification for Job Deck Data Format for Mask Tools -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI P45-0421 - Current

Revision

Abstract

This Document defines the common job deck data format specifications for mask tools, namely ‘MALY’.


MALY specification applies to the input data format for mask tools.

 

Referenced SEMI Standards (purchase separately)

SEMI P39 — Specification for OASIS® – Open Artwork System Interchange Standard

SEMI P44 — Specification for Open Artwork System Interchange Standard (OASIS®) Specific to Mask Tools

 

Revision History

SEMI P45-0421 (technical revision)

SEMI P45-1218 (technical revision)

SEMI P45-0211 (technical revision)

SEMI P45-0708 (technical revision)

SEMI P45-0306 (first published)

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

You May also Like