SEMI P45 - Specification for Job Deck Data Format for Mask Tools -

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Non-Member Price: $180.00

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI P45-0421 - Current



This Document defines the common job deck data format specifications for mask tools, namely ‘MALY’.

MALY specification applies to the input data format for mask tools.


Referenced SEMI Standards (purchase separately)

SEMI P39 — Specification for OASIS® – Open Artwork System Interchange Standard

SEMI P44 — Specification for Open Artwork System Interchange Standard (OASIS®) Specific to Mask Tools


Revision History

SEMI P45-0421 (technical revision)

SEMI P45-1218 (technical revision)

SEMI P45-0211 (technical revision)

SEMI P45-0708 (technical revision)

SEMI P45-0306 (first published)

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