SEMI P45 - Specification for Job Deck Data Format for Mask Tools

Volume(s): Microlithography
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 2018. Available at www.semiviews.org and www.semi.org in December 2018; originally published March 2006; previously published February 2011.

 

This Document defines the common job deck data format specifications for mask tools, namely "MALY."

 

MALY specification applies to the input data format for mask tools.

 

Referenced SEMI Standards

SEMI P39 — Specification for OASIS®Open Artwork System Interchange Standard
SEMI P44 — Specification for Open Artwork System Interchange Standard (OASIS®) Specific to Mask Tools

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