PV00100 - SEMI PV1 - 高分解能グロー放電質量分析を用いたシリコン太陽電池用シリコン原料中の微量元素測定に関するテスト方法

Volume(s): Photovoltaic
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Photovoltaic Committeeで技術的に承認されている。現版は20101221日,global Audits and Reviews Subcommitteeにて発行が承認された。20112月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は20093月発行,前版は20097月発行。



  1. 太陽電池ウェーハの目標バルク抵抗率に影響を与える故意または偶然に添加されたドーパント濃度
  2. 太陽電池ウェーハの少数キャリアライフタイムを劣化させる金属(例:鉄)やその他の不純物の濃度










日常の測定における大部分の元素の検出限界は100 µg/kg 1-100 ppbwt)である。


Referenced SEMI Standards

SEMI MF28 — Test Methods for Minority Carrier Lifetime in Bulk Germanium and Silicon by Measurement of Photoconductive Decay
SEMI MF43 — Test Methods for Resistivity of Semiconductor Materials
SEMI MF84 — Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe
SEMI MF391 — Test Method of Minority Carrier Diffusion Length in Extrinsic Semiconductors by Steady-State Surface Photovoltage
SEMI MF397 — Test Method for Resistivity of Silicon Bars Using a Two-Point Probe
SEMI MF525 — Test Method for Measuring Resistivity of Silicon Wafers Using Spreading Resistance Probe
SEMI MF673 — Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gauge
SEMI MF1389 — Test Methods for Photoluminescence Analysis of Single Crystal Silicon for III-V Impurities
SEMI MF1535 — Test Method for Carrier Recombination Lifetime in Silicon Wafers by Noncontact Measurement of Photoconductive Decay by Microwave Reflectance
SEMI MF1630 — Test Method for Low Temperature FT-IR Analysis of Single Crystal Silicon for III-V Impurities
SEMI MF1724 — Test Method for Measuring Surface Metal Contamination of Polycrystalline Silicon by Acid Extraction-Atomic Absorption Spectroscopy

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