SEMI PV3 - Guide for High Purity Water Used in Photovoltaic Cell Processing
This Standard was technically approved by the Photovoltaic - Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2015. Available at www.semiviews.org and www.semi.org in November 2015; originally published March 2010.
This Guide is provided for multiple purposes. It may be used as a basis for establishing performance criteria for purchases of new high purity water (HPW) equipment. It may also be used internally by facility engineers to set process control parameters for the operation of their HPW systems. This Guide may be used by process engineers to establish reasonable expectations about the quality of the HPW being supplied to them by facilities.
Water is used extensively in the production of photovoltaic cells and associated manufacturing for all wet processing steps such as the rinsing of substrate wafers and panels. HPW is typically produced for this purpose using Reverse Osmosis/Deionized resin bed technologies. The quality of the water impacts device yield. Requirements for higher purity water may increase with changes in the photovoltaic cell over time.
The guidelines are targeted for HPW produced for photovoltaic manufacturing.
The guidelines consider both general photovoltaic manufacturing facilities as well as critical manufacturing tools.
Location for water quality specification is defined at point-of-use (POU), which is a point of connection (POC) of the manufacturing tool on the HPW distribution lateral.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals