SEMI PV4 - Specification for Range of 5th Generation Substrate Sizes for Thin Film Photovoltaic Applications -

Member Price: $130.00
Non-Member Price: $170.00

Volume(s): Photovoltaic
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI PV4-0311 - Inactive



This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 3, 2011. Available at and in March 2011; originally published July 2010.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


Purpose of this Standard is to provide a range of substrate sizes to 5th generation substrate for thin film photovoltaic applications. 5th generation is a term typically quoted by LCD industry to define glass substrate size.


Purpose of this Standard is not to unify substrate size for thin film photovoltaic applications but to provide a range of substrate sizes for equipment applicable to 5th generation substrate which has large population.


Expected effect of this Standard is to reduce equipment (including AMHS) cost by preventing modification within a group of substrate sizes and to make wider opportunity of equipment selection by providing common allowance of substrate size.


The specification in this Document is to define range of substrate sizes for thin film photovoltaic application of 5th generation.


The substrate sizes in this Document are width, length and their tolerances.


This Standard does not address substrate size of monocrystal or multicrystal photovoltaic applications.


This Standard does not cover edge treatment, weight, material or orientation for transfer.


Referenced SEMI Standards


Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.