SEMI PV11 - Specification for Hydrofluoric Acid, Used in Photovoltaic Applications
This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2015. Available at www.semiviews.org and www.semi.org in November 2015; originally published November 2010.
This Document standardizes requirements for hydrofluoric acid used in the photovoltaic industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
The scope of this Document is grades of hydrofluoric acid used in the photovoltaic industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C28 — Specifications for Hydrofluoric Acid