SEMI PV21 - Guide for Silane (SiH4), Used in Photovoltaic Applications
This Standard was technically approved by the Photovoltaic – Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in October 2016; originally published October 2011.
This Document provides a suggested maximum impurity level for silane (SiH4) that is used in the photovoltaic industry.
This Document refers to an "as supplied" product; not point of use. Its quality is determined in a gaseous phase, at a delivery point agreed between the supplier and user, unless specified as a solid "deposited layer" derived from the gaseous source.
This Document is a guide and complete analytical methods are not contained within. Some of the available techniques for measuring impurities are shown in § 7.
Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits