SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System
This Standard was technically approved by the global Photovoltaic – Automation Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www.semiviews.org and www.semi.org in October 2012.
NOTICE: The designation of SEMI PV35 was updated during the 0114 publishing cycle to reflect the revision of SEMI PV35.1. No change was made to this Document.
The purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).
The purpose of this Standard is also to provide HC to perform both "Material and associated data transfer" and "General purpose data exchange" without factory host assistance.
The purpose of this Standard is also to provide HC specification to cover the following cases based on a common concept.
Various material transfer types (such as Single Substrate and Multiple Substrate with/without Carrier). Various material flow type combinations (such as Uni-Direction, Alternate-Direction, Bi-Direction and multiple set and/or combination of them).
The purpose of this Standard is also to provide HC specification that is compatible with various line connection topologies (such as Branch and Merge).
The purpose of this Standard is also to provide scalable specification to support sufficient HC functionality for lower implementation cost.
SEMI PV35.1-0114 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System
Referenced SEMI Standards