SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System -

Abstract

NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI A1.

 

The purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).

 

The purpose of this Standard is also to provide HC to perform both ‘Material and associated data transfer’ and ‘General purpose data exchange’ without factory host assistance.

 

The purpose of this Standard is also to provide HC specification to cover the following cases based on a common concept.

• Various material transfer types (such as Single Substrate and Multiple Substrate with/without Carrier).
• Various material flow type combinations (such as Uni-Direction, Alternate-Direction, Bi-Direction and multiple set and/or combination of them).

 

The purpose of this Standard is also to provide HC specification that is compatible with various line connection topologies (such as Branch and Merge).

 

The purpose of this Standard is also to provide scalable specification to support sufficient HC functionality for lower implementation cost.

 

Subordinate Standard (included)

SEMI PV35.1-0215 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI PV35-0215 (technical revision) - Replaced by SEMI A1

SEMI PV35-1214 (technical revision)

SEMI PV35-0414 (technical revision)

SEMI PV35-0114 (designation update)

SEMI PV35-1012 (first published)

 

SEMI PV35.1-0215 (technical revision) - Replaced by SEMI A1.1

SEMI PV35.1-1214 (technical revision)

SEMI PV35.1-0114 (first published) 

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