SEMI PV37 - Guide for Fluorine (F2), Used in Photovoltaic Applications
This Standard was technically approved by the Photovoltaic – Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.org in October 2018; originally published September 2012.
This Document provides suggested maximum impurity level for fluorine (F2) that is used in the photovoltaic industry.
This Document provides suggested values for grades of fluorine (F2) used in the photovoltaic industry.
This Document refers to an ‘as supplied’ product; not point of use. Its quality is determined in a gaseous phase, at a delivery point agreed between the supplier and user.
This Document is a guide and complete analytical methods are not contained within.
Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits
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