PV05300 - SEMI PV53 - Test Method for In-Line Monitoring of Flat Temperature Zone in Horizontal Diffusion Furnace

Volume(s): Photovoltaic
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Document covers the test method of flat temperature zone in horizontal diffusion furnace including the testing principle, testing devices, environment, testing steps and the calculation of the flat-temperature zone.


This Test Method is used for testing flat temperature zone in horizontal diffusion furnace. Horizontal PECVD equipment, horizontal vacuum annealing furnace, horizontal alloy furnace and other similar equipments can also be implemented by reference.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI PV53-0514 (Reapproved 1220)

SEMI PV53-0514 (first published)


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