SEMI PV53 - Test Method for In-Line Monitoring of Flat Temperature Zone in Horizontal Diffusion Furnace
This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at www.semiviews.org and www.semi.org in May 2014.
This Document covers the test method of flat temperature zone in horizontal diffusion furnace including the testing principle, testing devices, environment, testing steps and the calculation of the flat-temperature zone.
This Test Method is used for testing flat temperature zone in horizontal diffusion furnace. Horizontal PECVD equipment, horizontal vacuum annealing furnace, horizontal alloy furnace and other similar equipments can also be implemented by reference.
This Test Method can be applied to evaluate the performance of the heater tube in horizontal diffusion furnace.
Referenced SEMI Standards