PV05500 - SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System

Volume(s): Photovoltaic
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


The purpose of this Specification is to define a standard description of data, to be exchanged on an interface for horizontal communication between adjacent PV equipment.


XML and XML schemas are common and widely used techniques to describe data structures. This proposal uses these methods to describe data structures for crystalline and thin film equipment.

This Standard applies to data exchanged between all PV equipment which provides a standardized description of interfaces for horizontal communications.


Referenced SEMI Standards (purchase separately)

SEMI PV35 — Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System


Revision History

SEMI PV55-0415 (first published)

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