SEMI PV64 - 电感耦合等离子体光谱法测量光伏多晶硅用工业硅粉中B, P, Fe, Al, Ca的含量

Volume(s): Photovoltaic
Language: Chinese (Simplified)
Type: Single Standards Download (.pdf)

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.


This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at and in July 2015.

化是多晶硅制造程中的关键环节程需要大量使用硅粉,硅粉中B, P, Fe, Al, Ca的含量极大影响出三氯氢硅的度。因此,开一种方法来量硅粉中B, P, Fe, Al, Ca的含量是非常必要的。

本方法可便于在世界各地实验室之间统测试方案和测试结果,用于监测量硅粉中B, P, Fe, Al, Ca的含量。

定了用感耦合等离子体射光检测光伏多晶硅用工硅粉中B, P, Fe, Al, Ca含量的定方法。

Referenced SEMI Standards

SEMI C10 — Guide for Determination of Method Detection Limits
SEMI C28 –– Specifications for Hydrofluoric Acid
SEMI C35 –– Specifications and Guideline for Nitric Acid
SEMI PV17 — Specification for Virgin Silicon Feedstock Materials for Photovoltaic Applications
SEMI PV49 –– Test Method for the Measurement of Elemental Impurity Concentrations in Silicon Feedstock for Silicon Solar Cells by Bulk Digestion, Inductively Coupled-Plasma Mass Spectrometry

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