SEMI PV64 - 电感耦合等离子体光谱法测量光伏多晶硅用工业硅粉中B, P, Fe, Al, Ca的含量 -
Abstract
NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.
注意：這個翻譯是一個參考版本。如果您在使用上，發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處，請務必參考英文原文版本，並以英文原文版本為主，英文原文版本屬於正式和權威的版本。
This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in July 2015.
氢化是多晶硅制造过程中的关键环节。氢化过程需要大量使用硅粉，硅粉中B, P, Fe, Al, Ca的含量极大影响产出三氯氢硅的纯度。因此，开发一种方法来测量硅粉中B, P, Fe, Al, Ca的含量是非常必要的。
本方法可便于在世界各地实验室之间统一测试方案和测试结果，用于监测或测量硅粉中B, P, Fe, Al, Ca的含量。
本标准规定了用电感耦合等离子体发射光谱法检测光伏多晶硅用工业硅粉中B, P, Fe, Al, Ca含量的测定方法。
Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits
SEMI C28 –– Specifications for Hydrofluoric Acid
SEMI C35 –– Specifications and Guideline for Nitric Acid
SEMI PV17 — Specification for Virgin Silicon Feedstock Materials for Photovoltaic Applications
SEMI PV49 –– Test Method for the Measurement of Elemental Impurity Concentrations in Silicon Feedstock for Silicon Solar Cells by Bulk Digestion, Inductively Coupled-Plasma Mass Spectrometry
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