SEMI PV64 - Test Method for Determining B, P, Fe, Al, Ca Contents in Silicon Powder for PV Applications by Inductively Coupled Plasma Optical Emission Spectrometry -

Abstract

Hydrochlorination is a key process for the production of polysilicon. Hydrochlorination consumes a large amount of silicon powder. The contents of B, P, Fe, Al, Ca in silicon powder may affect the purity level of produced trichlorosilane significantly. Therefore, it is necessary to develop a method to measure the contents of B, P, Fe, Al, and Ca in silicon powder.

This Test Method can facilitate a unifying of protocols and test results among worldwide laboratories used for monitoring or qualifying B, P, Fe, Al, and Ca in silicon powder.

This Standard specifies a test method for determining the B, P, Fe, Al, Ca contents in silicon powder by inductively coupled plasma optical emission spectrometry (ICP-OES).

Referenced SEMI Standards (purchase separately)

SEMI C10 — Guide for Determination of Method Detection Limits

SEMI C28 –– Specification for Hydrofluoric Acid

SEMI C35 –– Specification and Guideline for Nitric Acid

SEMI PV17 — Specification for Virgin Silicon Feedstock Materials for Photovoltaic Applications

SEMI PV49 –– Test Method for the Measurement of Elemental Impurity Concentrations in Silicon Feedstock for Silicon Solar Cells by Bulk Digestion, Inductively Coupled-Plasma Mass Spectrometry

Revision History

SEMI PV64-0714 (Reapproved 0121)

SEMI PV64-0715 (first published)

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