SEMI PV64 - Test Method for Determining B, P, Fe, Al, Ca Contents in Silicon Powder for PV Applications by Inductively Coupled Plasma Optical Emission Spectrometry
This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in July 2015.
Hydrochlorination is a key process for the production of polysilicon. Hydrochlorination consumes a large amount of silicon powder. The contents of B, P, Fe, Al, Ca in silicon powder may affect the purity level of produced trichlorosilane significantly. Therefore, it is necessary to develop a method to measure the contents of B, P, Fe, Al, and Ca in silicon powder.
This Test Method can facilitate a unifying of protocols and test results among worldwide laboratories used for monitoring or qualifying B, P, Fe, Al, and Ca in silicon powder.
This Standard specifies a test method for determining the B, P, Fe, Al, Ca contents in silicon powder by inductively coupled plasma optical emission spectrometry (ICP-OES).
Referenced SEMI Standards
SEMI C10 — Guide for Determination of Method Detection Limits
SEMI C28 –– Specifications for Hydrofluoric Acid
SEMI C35 –– Specifications and Guideline for Nitric Acid
SEMI PV17 — Specification for Virgin Silicon Feedstock Materials for Photovoltaic Applications
SEMI PV49 –– Test Method for the Measurement of Elemental Impurity Concentrations in Silicon Feedstock for Silicon Solar Cells by Bulk Digestion, Inductively Coupled-Plasma Mass Spectrometry
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