SEMI PV67 - 晶体硅片腐蚀速率测试方法:称重法

Volume(s): Photovoltaic
Language: Chinese (Simplified)
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015.

 

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

注意:這個翻譯是一個參考版本。如果您在使用上,發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處,請務必參考英文原文版本,並以英文原文版本為主,英文原文版本屬於正式和權威的版本。

 

本标准的目的是制定一种快速准确的测试方法,通过称重法测试晶体硅片腐蚀速率的方法。

 

本标准规定了用称重法测试和计算晶体硅片腐蚀、周边刻蚀、抛光等腐蚀速率的方法。

 

本标准适用于晶体硅片在制作电池过程中腐蚀速率的测试。

 

本标准规定了腐蚀时间。

 

Referenced SEMI Standards

None.

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