SEMI PV67 - Test Method for the Etch Rate of a Crystalline Silicon Wafer by Determining the Weight Loss
This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015.
The purpose of this Standard is to standardize a fast and accurate test method for the etch rate of a crystalline silicon wafer by determining the weight loss.
This Standard specifies the test method of crystalline silicon wafer etch, edge isolation etch, polishing and other corrosion rate.
This Standard applies to the testing of etch rate in the process of making cells.
This Standard specifies the corrosion time.
Referenced SEMI Standards